IEEE Transactions on semiconductor manufacturing

Corp./Body Author
Institute of Electrical and Electronic Engineers
Place : Publisher

New York : Institute of Electrical and Electronics Engineers

From year - To year
1988-
Type of resource
Periodical
Language
English
Country of publication
Indeterminate country
ISSN
0894-6507
ISSN-L
0894-6507
UDC code
621.3
Codice Dewey code
621.3815/2
Journal code
P 00150151
Medium
Printed text
Acnp cumulative hol.
1988-
Libraries