Authors: SHOGUN V TYABLIKOV A ABACHEV M PASHKOV V SCHARFF W WALLENDORF T

Citation: V. Shogun et al., AN EMISSION ACTINOMETRIC METHOD FOR MEASURING OF PLASMACHEMICAL REACTION KINETIC-PARAMETERS WITH DISCHARGE POWER MODULATION BY A SERIES OF SHORT PROBING PULSES, Surface & coatings technology, 98(1-3), 1998, pp. 1406-1410

Authors: SHOGUN V TYABLIKOV A SHELYHMANOV E ABACHEV M SCHARFF W WALLENDORF T

Citation: V. Shogun et al., APPLICATION OF AN ACOUSTOOPTIC SPECTROMETER FOR PLASMA-ETCHING PROCESS QUALITY-CONTROL, Surface & coatings technology, 74-5(1-3), 1995, pp. 571-574