Citation: N. Abuageel et al., TEMPERATURE-DEPENDENCE OF CONDUCTIVITY AND HALL CARRIER CONCENTRATIONOF POLYCRYSTALLINE SIC DEPOSITED ON FUSED-SILICA BY LASER-ABLATION, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 16(1), 1998, pp. 142-146
Authors:
RIMAI L
AGER R
HANGAS J
LOGOTHETIS EM
ABUAGEEL N
ASLAM M
Citation: L. Rimai et al., PULSED-LASER DEPOSITION OF SIC FILMS ON FUSED-SILICA AND SAPPHIRE SUBSTRATES, Journal of applied physics, 73(12), 1993, pp. 8242-8249