Authors: ACHE HF GOSCHNICK J SOMMER M EMIG G SCHOCH G WORMER O

Citation: Hf. Ache et al., CHEMICAL-VAPOR-DEPOSITION OF HAFNIUM CARBIDE AND CHARACTERIZATION OF THE DEPOSITED LAYERS BY SECONDARY-NEUTRAL MASS-SPECTROMETRY, Thin solid films, 241(1-2), 1994, pp. 356-360