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Results: 2
GROWTH-PROCESSES OF DIELECTRIC THIN-FILMS IN A MULTIPOLAR MICROWAVE PLASMA EXCITED BY DISTRIBUTED ELECTRON-CYCLOTRON-RESONANCE USING TETRAETHYLORTHOSILICATE (TEOS) AND OXYGEN PRECURSORS
Authors: DELSOL R RAYNAUD P SEGUI Y LATRECHE M AGRES L MAGE L
Citation: R. Delsol et al., GROWTH-PROCESSES OF DIELECTRIC THIN-FILMS IN A MULTIPOLAR MICROWAVE PLASMA EXCITED BY DISTRIBUTED ELECTRON-CYCLOTRON-RESONANCE USING TETRAETHYLORTHOSILICATE (TEOS) AND OXYGEN PRECURSORS, Thin solid films, 289(1-2), 1996, pp. 170-176
OXYGEN BARRIER EFFICIENCY OF HEXAMETHYLDISILOXANE OXYGEN PLASMA-DEPOSITED COATING/
Authors: AGRES L SEGUI Y DELSOL R RAYNAUD P
Citation: L. Agres et al., OXYGEN BARRIER EFFICIENCY OF HEXAMETHYLDISILOXANE OXYGEN PLASMA-DEPOSITED COATING/, Journal of applied polymer science, 61(11), 1996, pp. 2015-2022
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