Authors:
LECOEUR F
LAGARDE T
PELLETIER J
AMAL Y
BURKE R
BRUNEL M
Citation: F. Lecoeur et al., DISTRIBUTED ELECTRON-CYCLOTRON-RESONANCE PLASMA IMMERSION FOR LARGE-AREA ION-IMPLANTATION (INVITED), Review of scientific instruments, 69(2), 1998, pp. 831-836