Authors: RICHTER HH AMINPUR MA ERZGRABER HB WOLFF A KRUGER D DEHOFF A REETZ M

Citation: Hh. Richter et al., SILICON DRY-ETCHING IN HYDROGEN IODIDE PLASMAS - SURFACE DIAGNOSTICS AND TECHNOLOGICAL APPLICATIONS, JPN J A P 1, 36(7B), 1997, pp. 4849-4853