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EFFECTS OF REACTION-KINETICS ON THE MICROSTRUCTURE OF CHEMICAL-VAPOR-DEPOSITED COPPER-FILMS - EXPERIMENT AND SIMULATION
Authors:
GOSWAMI J SHIVASHANKAR SA ANATHAKRISHNA G
Citation:
J. Goswami et al., EFFECTS OF REACTION-KINETICS ON THE MICROSTRUCTURE OF CHEMICAL-VAPOR-DEPOSITED COPPER-FILMS - EXPERIMENT AND SIMULATION, Thin solid films, 305(1-2), 1997, pp. 52-60
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