Citation: Is. Yeo et al., LINEWIDTH DEPENDENCE OF STRESS-RELAXATION AND MICROSTRUCTURAL CHANGE IN PASSIVATED AL(CU) LINES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(4), 1997, pp. 908-915
Authors:
YEO IS
ANDERSON SGH
JAWARANI D
HO PS
CLARKE AP
SAIMOTO S
RAMASWAMI S
CHEUNG R
Citation: Is. Yeo et al., EFFECTS OF OXIDE OVERLAYER ON THERMAL-STRESS AND YIELD BEHAVIOR OF AL-ALLOY FILMS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(4), 1996, pp. 2636-2644
Citation: Is. Yeo et al., CHARACTERISTICS OF THERMAL-STRESSES IN AL(CU) FINE LINES .1. UNPASSIVATED LINE STRUCTURES, Journal of applied physics, 78(2), 1995, pp. 945-952
Citation: Is. Yeo et al., CHARACTERISTICS OF THERMAL-STRESSES IN AL(CU) FINE LINES .2. PASSIVATED LINE STRUCTURES, Journal of applied physics, 78(2), 1995, pp. 953-961
Authors:
PELLERIN JG
ANDERSON SGH
HO PS
WOOTEN C
COFFEY KR
HOWARD JK
BARMAK K
Citation: Jg. Pellerin et al., GRAIN-BOUNDARY DIFFUSION AND ITS EFFECTS ON THE MAGNETIC-PROPERTIES OF CO CU AND CO CR THIN-FILM BILAYERS, Journal of applied physics, 75(10), 1994, pp. 5052-5060