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Authors: LOUIS E VOORMA HJ KOSTER NB BIJKERK F PLATONOV YY ZUEV SY ANDREEV SS SHAMOV EA SALASHCHENKO NN
Citation: E. Louis et al., MULTILAYER COATED REFLECTIVE OPTICS FOR EXTREME UV LITHOGRAPHY, Microelectronic engineering, 27(1-4), 1995, pp. 235-238

Authors: ANDREEV SS AKHSAKHALYAN AD DROZDOV MN POLUSHKIN NI SALASHCHENKO NN
Citation: Ss. Andreev et al., HIGH-RESOLUTION AUGER DEPTH PROFILING OF MULTILAYER STRUCTURES MO SI,MO/B4C, NI/C/, Thin solid films, 263(2), 1995, pp. 169-174
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