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Authors: APARSHINA LI DUBONOS SV MAKSIMOV SV SVINTSOV AA ZAITSEV SI

Citation: Li. Aparshina et al., ENERGY-DEPENDENCE OF PROXIMITY PARAMETERS INVESTIGATED BY FITTING BEFORE MEASUREMENT TESTS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(6), 1997, pp. 2298-2302