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Authors: HAYDEN DB JULIANO DR GREEN KM RUZIC DN WEISS CA ASHTIANI KA LICATA TJ
Citation: Db. Hayden et al., CHARACTERIZATION OF MAGNETRON-SPUTTERED PARTIALLY-IONIZED ALUMINUM DEPOSITION, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(2), 1998, pp. 624-627

Authors: ASHTIANI KA SHOHET JL HITCHON WNG KIM GH HERSHKOWITZ N
Citation: Ka. Ashtiani et al., A 2-DIMENSIONAL PARTICLE-IN-CELL SIMULATION OF AN ELECTRON-CYCLOTRON-RESONANCE ETCHING TOOL, Journal of applied physics, 78(4), 1995, pp. 2270-2278
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