Authors:
HAYDEN DB
JULIANO DR
GREEN KM
RUZIC DN
WEISS CA
ASHTIANI KA
LICATA TJ
Citation: Db. Hayden et al., CHARACTERIZATION OF MAGNETRON-SPUTTERED PARTIALLY-IONIZED ALUMINUM DEPOSITION, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(2), 1998, pp. 624-627
Authors:
ASHTIANI KA
SHOHET JL
HITCHON WNG
KIM GH
HERSHKOWITZ N
Citation: Ka. Ashtiani et al., A 2-DIMENSIONAL PARTICLE-IN-CELL SIMULATION OF AN ELECTRON-CYCLOTRON-RESONANCE ETCHING TOOL, Journal of applied physics, 78(4), 1995, pp. 2270-2278