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Results:
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Results: 6
Plasma etch profiles of passivated open-area trenches
Authors:
Abraham-Shrauner, B
Citation:
B. Abraham-shrauner, Plasma etch profiles of passivated open-area trenches, J VAC SCI B, 19(3), 2001, pp. 711-721
Model etch profiles for ion energy distribution functions in an inductively coupled plasma reactor
Authors:
Chen, WJ Abraham-Shrauner, B Woodworth, JR
Citation:
Wj. Chen et al., Model etch profiles for ion energy distribution functions in an inductively coupled plasma reactor, J VAC SCI B, 17(5), 1999, pp. 2061-2069
Model for etch depth dependence on GaAs via hole diameter
Authors:
Abraham-Shrauner, B Nordheden, KJ Lee, YS
Citation:
B. Abraham-shrauner et al., Model for etch depth dependence on GaAs via hole diameter, J VAC SCI B, 17(3), 1999, pp. 961-964
Contact hole model for etch depth dependence
Authors:
Abraham-Shrauner, B
Citation:
B. Abraham-shrauner, Contact hole model for etch depth dependence, J VAC SCI B, 17(1), 1999, pp. 158-161
Modification of plasma-etched profiles by sputtering
Authors:
Abraham-Shrauner, B Jagannathan, N
Citation:
B. Abraham-shrauner et N. Jagannathan, Modification of plasma-etched profiles by sputtering, IEEE PLAS S, 27(3), 1999, pp. 668-675
Symmetries of first integrals and their associated differential equations
Authors:
Leach, PGL Govinder, KS Abraham-Shrauner, B
Citation:
Pgl. Leach et al., Symmetries of first integrals and their associated differential equations, J MATH ANAL, 235(1), 1999, pp. 58-83
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