Authors: Sone, S Akahane, R Arita, K Yabuta, H Yamamichi, S Yoshida, M Kato, Y

Citation: S. Sone et al., Electrical properties of (Ba, Sr)TiO3 films on Ru bottom electrodes prepared by electron cyclotron resonance plasma chemical vapor deposition at extremely low temperature and rapid thermal annealing, JPN J A P 1, 38(4B), 1999, pp. 2200-2204