Authors:
Luca, D
van der Gon, AWD
Anita, V
Ponjee, MWG
Brongersma, HH
Popa, G
Citation: D. Luca et al., Surface nitridation processes and non-linear behaviour of the reactive magnetron discharge with titanium target, VACUUM, 61(2-4), 2001, pp. 163-167