Authors: Bowallius, O Ankarcrona, J Hammar, M Anand, S Nilsson, S Landgren, G Radamson, H Tilly, L

Citation: O. Bowallius et al., Scanning capacitance microscopy for two-dimensional doping profiling in Si- and InP-based device structures, PHYS SCR, T79, 1999, pp. 163-166