Authors: Woodworth, JR Riley, ME Arnatucci, VA Hamilton, TW Aragon, BP

Citation: Jr. Woodworth et al., Absolute intensities of the vacuum ultraviolet spectra in oxide etch plasma processing discharges, J VAC SCI A, 19(1), 2001, pp. 45-55

Authors: Woodworth, JR Blain, MG Jarecki, RL Hamilton, TW Aragon, BP

Citation: Jr. Woodworth et al., Absolute intensities of the vacuum ultraviolet spectra in a metal-etch plasma processing discharge, J VAC SCI A, 17(6), 1999, pp. 3209-3217