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Results: 1
Optoelectronic and structural properties of amorphous silicon-carbon alloys deposited by low-power electron-cyclotron resonance plasma-enhanced chemical-vapor deposition
Authors:
Conde, JP Chu, V da Silva, MF Kling, A Dai, Z Soares, JC Arekat, S Fedorov, A Berberan-Santos, MN Giorgis, F Pirri, CF
Citation:
Jp. Conde et al., Optoelectronic and structural properties of amorphous silicon-carbon alloys deposited by low-power electron-cyclotron resonance plasma-enhanced chemical-vapor deposition, J APPL PHYS, 85(6), 1999, pp. 3327-3338
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