Authors: Dimoulas, A Travlos, A Vellianitis, G Boukos, N Argyropoulos, K

Citation: A. Dimoulas et al., Direct heteroepitaxy of crystalline Y2O3 on Si (001) for high-k gate dielectric applications, J APPL PHYS, 90(8), 2001, pp. 4224-4230