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Results: 1
Absolute intensities of the vacuum ultraviolet spectra in oxide etch plasma processing discharges
Authors:
Woodworth, JR Riley, ME Arnatucci, VA Hamilton, TW Aragon, BP
Citation:
Jr. Woodworth et al., Absolute intensities of the vacuum ultraviolet spectra in oxide etch plasma processing discharges, J VAC SCI A, 19(1), 2001, pp. 45-55
Risultati:
1-1
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