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Citation: T. Dimitrova et al., Crystallization effects in oxygen annealed Ta2O5 thin films on Si, THIN SOL FI, 381(1), 2001, pp. 31-38

Authors: Arshak, K Arshak, A Mihov, M McDonagh, D

Citation: K. Arshak et al., Modelling and simulations for 40 nm lines/spaces in 1 mu m Shipley SPR510Aresist using PRIME process, MICROELEC J, 32(8), 2001, pp. 687-697