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Citation: Wr. Ashurst et al., Dichlorodimethylsilane as an anti-stiction monolayer for MEMS: A comparison to the octadecyltrichlosilane self-assembled monolayer, J MICROEL S, 10(1), 2001, pp. 41-49

Authors: Ashurst, WR Yau, C Carraro, C Lee, C Kluth, GJ Howe, RT Maboudian, R

Citation: Wr. Ashurst et al., Alkene based monolayer films as anti-stiction coatings for polysilicon MEMS, SENS ACTU-A, 91(3), 2001, pp. 239-248

Authors: Han, SM Ashurst, WR Carraro, C Maboudian, R

Citation: Sm. Han et al., Formation of alkanethiol monolayer on Ge(111), J AM CHEM S, 123(10), 2001, pp. 2422-2425

Authors: Maboudian, R Ashurst, WR Carraro, C

Citation: R. Maboudian et al., Self-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent developments, SENS ACTU-A, 82(1-3), 2000, pp. 219-223