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Results: 1
Design of a low power SnO2 gas sensor integrated on silicon oxynitride membrane
Authors:
Astie, S Gue, AM Scheid, E Guillemet, JP
Citation:
S. Astie et al., Design of a low power SnO2 gas sensor integrated on silicon oxynitride membrane, SENS ACTU-B, 67(1-2), 2000, pp. 84-88
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