Authors: Hansen, DM Charters, D Au, YL Mak, WK Tejasukmana, W Moran, PD Kuech, TF

Citation: Dm. Hansen et al., Mechanistic study of borosilicate glass growth by low-pressure chemical vapor deposition from tetraethylorthosilicate and trimethylborate, J ELEC MAT, 29(11), 2000, pp. 1312-1318