Authors:
Hansen, DM
Charters, D
Au, YL
Mak, WK
Tejasukmana, W
Moran, PD
Kuech, TF
Citation: Dm. Hansen et al., Mechanistic study of borosilicate glass growth by low-pressure chemical vapor deposition from tetraethylorthosilicate and trimethylborate, J ELEC MAT, 29(11), 2000, pp. 1312-1318