Authors: Ayazi, F Najafi, K

Citation: F. Ayazi et K. Najafi, A HARPSS polysilicon vibrating ring gyroscope, J MICROEL S, 10(2), 2001, pp. 169-179

Authors: Ayazi, F Najafi, K

Citation: F. Ayazi et K. Najafi, High aspect-ratio combined poly and single-crystal silicon (HARPSS) MEMS technology, J MICROEL S, 9(3), 2000, pp. 288-294

Authors: Ayazi, F Najafi, K

Citation: F. Ayazi et K. Najafi, High aspect-ratio polysilicon micromachining technology, SENS ACTU-A, 87(1-2), 2000, pp. 46-51