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HYDROGENATED AMORPHOUS-SILICON FILMS BY 60 HZ GLOW-DISCHARGE DEPOSITION
Authors: FRAGALLI JF MISOGUTI L NAKAGAITO AN GRIVICKAS V BAGNATO VS BRANZ HM
Citation: Jf. Fragalli et al., HYDROGENATED AMORPHOUS-SILICON FILMS BY 60 HZ GLOW-DISCHARGE DEPOSITION, Journal of applied physics, 74(1), 1993, pp. 668-671
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