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BAIOCCHI F
LANE E
LEE CH
HALL C
DOTING J
GRIJSBACH C
HARRIS K
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WHEELER DR
HUTTON S
STEIN S
BAIOCCHI F
CHENG M
TAYLOR G
Citation: Dr. Wheeler et al., NEW SILICON-RICH SILYLATING REAGENTS FOR DRY-DEVELOPED POSITIVE-TONE DEEP-ULTRAVIOLET LITHOGRAPHY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(6), 1993, pp. 2789-2793