Authors:
ISHIGAKI T
FAN XB
SAKUTA T
BANJO T
SHIBUYA Y
Citation: T. Ishigaki et al., GENERATION OF PULSE-MODULATED INDUCTION THERMAL PLASMA AT ATMOSPHERIC-PRESSURE, Applied physics letters, 71(26), 1997, pp. 3787-3789
Authors:
FUJIWARA N
MARUYAMA T
YONEDA M
TSUKAMOTO K
BANJO T
Citation: N. Fujiwara et al., EFFECT PLASMA TRANSPORT ON ETCHED PROFILES WITH SURFACE-TOPOGRAPHY INDIVERGING FIELD ELECTRON-CYCLOTRON-RESONANCE PLASMA, JPN J A P 1, 33(4B), 1994, pp. 2164-2169
Authors:
MARUYAMA T
FUJIWARA N
YONEDA M
TSUKAMOTO K
BANJO T
Citation: T. Maruyama et al., MECHANISM OF REACTIVE ION ETCHING LAG IN WSI2 ETCHING USING ELECTRON-CYCLOTRON-RESONANCE PLASMA, JPN J A P 1, 33(4B), 1994, pp. 2170-2174