AAAAAA

   
Results: 1-4 |
Results: 4

Authors: BANJO T TSUCHIHASHI M HANAZAKI M TUDA M ONO K
Citation: T. Banjo et al., EFFECTS OF O-2 ADDITION ON BCL3 CL-2 PLASMA CHEMISTRY FOR AL ETCHING/, JPN J A P 1, 36(7B), 1997, pp. 4824-4828

Authors: ISHIGAKI T FAN XB SAKUTA T BANJO T SHIBUYA Y
Citation: T. Ishigaki et al., GENERATION OF PULSE-MODULATED INDUCTION THERMAL PLASMA AT ATMOSPHERIC-PRESSURE, Applied physics letters, 71(26), 1997, pp. 3787-3789

Authors: FUJIWARA N MARUYAMA T YONEDA M TSUKAMOTO K BANJO T
Citation: N. Fujiwara et al., EFFECT PLASMA TRANSPORT ON ETCHED PROFILES WITH SURFACE-TOPOGRAPHY INDIVERGING FIELD ELECTRON-CYCLOTRON-RESONANCE PLASMA, JPN J A P 1, 33(4B), 1994, pp. 2164-2169

Authors: MARUYAMA T FUJIWARA N YONEDA M TSUKAMOTO K BANJO T
Citation: T. Maruyama et al., MECHANISM OF REACTIVE ION ETCHING LAG IN WSI2 ETCHING USING ELECTRON-CYCLOTRON-RESONANCE PLASMA, JPN J A P 1, 33(4B), 1994, pp. 2170-2174
Risultati: 1-4 |