Authors: BANJOU T TSUTAHARA K KAWAHARA T YUUKI A MATSUI Y

Citation: T. Banjou et al., REACTION ANALYSIS AND APPARATUS DEVELOPME NT OF TEOS O-3 ATMOSPHERIC-PRESSURE CVD/, Kagaku kogaku ronbunshu, 20(5), 1994, pp. 610-617

Authors: BANJOU T SAKAMOTO K TSUTAHARA K YAMAGUCHI T YUUKI A KAWAHARA T

Citation: T. Banjou et al., A DEVELOPMENT OF SINGLE-WAFER TYPE APCVD EQUIPMENT FOR SIO2 FILM DEPOSITION, Kagaku kogaku ronbunshu, 20(4), 1994, pp. 489-496