Authors: COLLISON WZ NI TQ BARNES MS

Citation: Wz. Collison et al., STUDIES OF THE LOW-PRESSURE INDUCTIVELY-COUPLED PLASMA-ETCHING FOR A LARGER AREA WAFER USING PLASMA MODELING AND LANGMUIR PROBE, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(1), 1998, pp. 100-107

Authors: KUSHNER MJ COLLISON WZ GRAPPERHAUS MJ HOLLAND JP BARNES MS

Citation: Mj. Kushner et al., A 3-DIMENSIONAL MODEL FOR INDUCTIVELY-COUPLED PLASMA-ETCHING REACTORS- AZIMUTHAL SYMMETRY, COIL PROPERTIES, AND COMPARISON TO EXPERIMENTS, Journal of applied physics, 80(3), 1996, pp. 1337-1344

Authors: KELLER JH FORSTER JC BARNES MS

Citation: Jh. Keller et al., NOVEL RADIOFREQUENCY INDUCTION PLASMA PROCESSING TECHNIQUES, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 11(5), 1993, pp. 2487-2491

Authors: BARNES MS

Citation: Ms. Barnes, ONE EXPERIENCE OF VIDEO RECORDED INTERVIEWS, Criminal law review, 1993, pp. 444-446

Authors: BARNES MS FORSTER JC KELLER JH

Citation: Ms. Barnes et al., ELECTRON-ENERGY DISTRIBUTION FUNCTION MEASUREMENTS IN A PLANAR INDUCTIVE OXYGEN RADIO-FREQUENCY GLOW-DISCHARGE, Applied physics letters, 62(21), 1993, pp. 2622-2624