Authors: BENSON TE KAMLET LI RUEGSEGGER SM HANISH CK HANISH PD RASHAP BA KLIMECKY P FREUDENBERG JS GRIZZLE JW KHARGONEKAR PP TERRY FL BARNEY B

Citation: Te. Benson et al., SENSOR SYSTEMS FOR REAL-TIME FEEDBACK-CONTROL OF REACTIVE ION ETCHING, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(1), 1996, pp. 483-488