Authors:
TEJNIL E
GOLDBERG KA
LEE SH
MEDECKI H
BATSON PJ
DENHAM PE
MACDOWELL AA
BOKOR J
ATTWOOD D
Citation: E. Tejnil et al., AT-WAVELENGTH INTERFEROMETRY FOR EXTREME-ULTRAVIOLET LITHOGRAPHY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(6), 1997, pp. 2455-2461
Authors:
KOCH JA
MACGOWAN BJ
DASILVA LB
MATTHEWS DL
UNDERWOOD JH
BATSON PJ
LEE RW
LONDON RA
MROWKA S
Citation: Ja. Koch et al., EXPERIMENTAL AND THEORETICAL INVESTIGATION OF NEON-LIKE SELENIUM X-RAY LASER SPECTRAL LINEWIDTHS AND THEIR VARIATION WITH AMPLIFICATION, Physical review. A, 50(2), 1994, pp. 1877-1898