Authors:
MARXER C
THIO C
GRETILLAT MA
DEROOIJ NF
BATTIG R
ANTHAMATTEN O
VALK B
VOGEL P
Citation: C. Marxer et al., VERTICAL MIRRORS FABRICATED BY DEEP REACTIVE ION ETCHING FOR FIBEROPTIC SWITCHING APPLICATIONS, Journal of microelectromechanical systems, 6(3), 1997, pp. 277-285
Authors:
MARXER C
GRETILLAT MA
DEROOIJ NF
BATTIG R
ANTHAMATTEN O
VALK B
VOGEL P
Citation: C. Marxer et al., RELIABILITY CONSIDERATIONS FOR ELECTROSTATIC POLYSILICON ACTUATORS USING AS AN EXAMPLE THE REMO COMPONENT, Sensors and actuators. A, Physical, 61(1-3), 1997, pp. 449-454
Citation: B. Valk et al., LASER-WELDING FOR FIBER PIGTAILING WITH LONG-TERM STABILITY AND SUBMICRON ACCURACY, Optical engineering, 34(9), 1995, pp. 2675-2682