Authors:
BAUM AW
SCHNEIDER JE
PEASE RFW
MCCORD MA
SPICER WE
COSTELLO KA
AEBI VW
Citation: Aw. Baum et al., SEMICONDUCTOR ON GLASS PHOTOCATHODES FOR HIGH-THROUGHPUT MASKLESS ELECTRON-BEAM LITHOGRAPHY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(6), 1997, pp. 2707-2712
Authors:
SCHNEIDER JE
BAUM AW
WINOGRAD GI
PEASE RFW
MCCORD M
SPICER WE
COSTELLO KA
AEBI VW
Citation: Je. Schneider et al., SEMICONDUCTOR ON GLASS PHOTOCATHODES AS HIGH-PERFORMANCE SOURCES FOR PARALLEL ELECTRON-BEAM LITHOGRAPHY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(6), 1996, pp. 3782-3786