Authors: BAUM AW SCHNEIDER JE PEASE RFW MCCORD MA SPICER WE COSTELLO KA AEBI VW

Citation: Aw. Baum et al., SEMICONDUCTOR ON GLASS PHOTOCATHODES FOR HIGH-THROUGHPUT MASKLESS ELECTRON-BEAM LITHOGRAPHY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(6), 1997, pp. 2707-2712

Authors: SCHNEIDER JE BAUM AW WINOGRAD GI PEASE RFW MCCORD M SPICER WE COSTELLO KA AEBI VW

Citation: Je. Schneider et al., SEMICONDUCTOR ON GLASS PHOTOCATHODES AS HIGH-PERFORMANCE SOURCES FOR PARALLEL ELECTRON-BEAM LITHOGRAPHY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(6), 1996, pp. 3782-3786