Authors: BECKMAN JC CHANG THP WAGNER A PEASE RFW

Citation: Jc. Beckman et al., MINIMUM EMISSION CURRENT OF LIQUID-METAL ION SOURCES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(6), 1997, pp. 2332-2336

Authors: BECKMAN JC CHANG THP WAGNER A PEASE RFW

Citation: Jc. Beckman et al., ENERGY SPREAD IN LIQUID-METAL ION SOURCES AT LOW CURRENTS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(6), 1996, pp. 3911-3915