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Authors: SINGH V BERNEY B KRISHNAN A
Citation: V. Singh et al., DESIGNING LOW-PRESSURE SYSTEMS WITH CONTINUUM MODELS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(3), 1996, pp. 1252-1257

Authors: SHUFFLEBOTHAM PK BARTEL TJ BERNEY B
Citation: Pk. Shufflebotham et al., EXPERIMENTAL VALIDATION OF A DIRECT SIMULATION BY MONTE-CARLO MOLECULAR GAS-FLOW MODEL, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(4), 1995, pp. 1862-1866
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