Authors: SEASSAL C LECLERCQ JL FIERLING G LETARTRE X GENDRY M VIKTOROVITCH P BERTIC Y TROUILLET A CACHARD A BENECH P LAINE JP SIDOROFF F

Citation: C. Seassal et al., INP-BASED MICROMACHINED MACH-ZEHNDER INTERFEROMETER STRESS SENSORS, Microsystem technologies, 3(3), 1997, pp. 139-144