Authors: YASUDA H ARAI S KAI J OOAE Y ABE T TAKAHASHI Y HUEKI S MARUYAMA S SAGO S BETSUI K

Citation: H. Yasuda et al., FAST-ELECTRON BEAM LITHOGRAPHY SYSTEM WITH 1024 BEAMS INDIVIDUALLY CONTROLLED BY BLANKING APERTURE ARRAY, JPN J A P 1, 32(12B), 1993, pp. 6012-6017