Authors: DELLMANN L ROTH S BEURET C PARATTE L RACINE GA LORENZ H DESPONT M RENAUD P VETTIGER P DEROOIJ NF

Citation: L. Dellmann et al., 2 STEPS MICROMOULDING AND PHOTOPOLYMER HIGH-ASPECT-RATIO STRUCTURING FOR APPLICATIONS IN PIEZOELECTRIC MOTOR COMPONENTS, Microsystem technologies, 4(3), 1998, pp. 147-150

Authors: DELLMANN L ROTH S BEURET C RACINE GA LORENZ H DESPONT M RENAUD P VETTIGER P DEROOIJ NF

Citation: L. Dellmann et al., FABRICATION PROCESS OF HIGH-ASPECT-RATIO ELASTIC AND SU-8 STRUCTURES FOR PIEZOELECTRIC MOTOR APPLICATIONS, Sensors and actuators. A, Physical, 70(1-2), 1998, pp. 42-47

Authors: BEURET C NIEDERMANN P STAUFER U DEROOIJ NF

Citation: C. Beuret et al., FABRICATION OF METALLIC PROBES BY A NEW TECHNOLOGY-BASED ON DOUBLE MOLDING, Microelectronic engineering, 42, 1998, pp. 543-546

Authors: HEEREN PH REYNAERTS D VANBRUSSEL H BEURET C LARSSON O BERTHOLDS A

Citation: Ph. Heeren et al., MICROSTRUCTURING OF SILICON BY ELECTRODISCHARGE MACHINING (EDM) .2. APPLICATIONS, Sensors and actuators. A, Physical, 61(1-3), 1997, pp. 379-386