Authors: BEYER GP PATEL SB KILNER JA

Citation: Gp. Beyer et al., A SIMS STUDY OF THE ALTERED LAYER IN SI USING O-18(2) PRIMARIES AT VARIOUS ANGLES OF INCIDENCE, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 85(1-4), 1994, pp. 370-373

Authors: KILNER JA BEYER GP CHATER RJ

Citation: Ja. Kilner et al., O-18 STUDIES OF ALTERED LAYERS FORMED IN SI AND SIO2 BY ION-BOMBARDMENT, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 84(2), 1994, pp. 176-180