Authors: SHAREEF IA RUBLOFF GW BILL WN

Citation: Ia. Shareef et al., ROLE OF GAS-PHASE REACTIONS IN SUBATMOSPHERIC CHEMICAL-VAPOR-DEPOSITION OZONE TEOS PROCESSES FOR OXIDE DEPOSITION/, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(2), 1996, pp. 772-774