Authors: KUZNETSOVA A BURLEIGH TD ZHUKOV V BLACHERE J YATES JT

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Authors: BASIT NA KIM HK BLACHERE J

Citation: Na. Basit et al., TEMPERATURE-DEPENDENCE OF LEAD LOSS IN RF MAGNETRON SPUTTERING OF A STOICHIOMETRIC PB(ZR,TI)O-3 TARGET, Thin solid films, 302(1-2), 1997, pp. 155-161