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Results: 2
METALLIZATION FOR INTEGRATED-CIRCUIT MANUFACTURING
Authors:
JOSHI RV BLEWER RS MURARKA S
Citation:
Rv. Joshi et al., METALLIZATION FOR INTEGRATED-CIRCUIT MANUFACTURING, MRS bulletin, 20(11), 1995, pp. 33-37
IN-SITU MONITORING OF THE PRODUCTS FROM THE SIH4-VAPOR-DEPOSITION PROCESS BY MICROVOLUME MOSS SPECTROMETRY(WF6 TUNGSTEN CHEMICAL)
Authors:
CHEEK RW KELBER JA FLEMING JG BLEWER RS LUJAN RD
Citation:
Rw. Cheek et al., IN-SITU MONITORING OF THE PRODUCTS FROM THE SIH4-VAPOR-DEPOSITION PROCESS BY MICROVOLUME MOSS SPECTROMETRY(WF6 TUNGSTEN CHEMICAL), Journal of the Electrochemical Society, 140(12), 1993, pp. 3588-3590
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