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Results:
1-7
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Results: 7
Authors:
BLEY P
Citation: P. Bley, INTERNATIONAL-CONFERENCE ON HIGH-ASPECT-RATIO MICROSTRUCTURE TECHNOLOGY HARMST-97, Microsystem technologies, 4(3), 1998, pp. 103-103
Authors:
BLEY P
Citation: P. Bley, MICROSYSTEMS TECHNOLOGY, Advanced materials, 10(16), 1998, pp. 1291
Authors:
BLEY P
Citation: P. Bley, INTERNATIONAL-CONFERENCE ON HIGH-ASPECT-RATIO MICROSTRUCTURE TECHNOLOGY HARMST-97, Microsystem technologies, 4(1), 1997, pp. 1-1
Authors:
BLEY P
Citation: P. Bley, HARMST CONFERENCE IN KARLSRUHE, JULY 3-5, 1995, Metall, 49(10), 1995, pp. 671-671
Authors:
STROHRMANN M
BLEY P
FROMHEIN O
MOHR J
Citation: M. Strohrmann et al., ACCELERATION SENSOR WITH INTEGRATED COMPENSATION OF TEMPERATURE EFFECTS FABRICATED BY THE LIGA PROCESS, Sensors and actuators. A, Physical, 42(1-3), 1994, pp. 426-429
Authors:
BLEY P
Citation: P. Bley, THE LIGA PROCESS FOR FABRICATION OF 3-DIMENSIONAL MICROSCALE STRUCTURES, ISR, Interdisciplinary science reviews, 18(3), 1993, pp. 267-272
Authors:
ELKHOLI A
BLEY P
GOTTERT J
MOHR J
Citation: A. Elkholi et al., EXAMINATION OF THE SOLUBILITY AND THE MOLECULAR-WEIGHT DISTRIBUTION OF PMMA IN VIEW OF AN OPTIMIZED RESIST SYSTEM IN DEEP ETCH X-RAY-LITHOGRAPHY, Microelectronic engineering, 21(1-4), 1993, pp. 271-274
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