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Authors: KELLERMAN BK MAHAJAN A RUSSELL NM EKERDT JG BANERJEE SK TASCH AF CAMPION A WHITE JM BONSER DJ
Citation: Bk. Kellerman et al., ADSORPTION AND DECOMPOSITION OF DIETHYLSILANE AND DIETHYLGERMANE ON SI(100) - SURFACE-REACTIONS FOR AN ATOMIC LAYER EPITAXIAL APPROACH TO COLUMN-IV EPITAXY, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(4), 1995, pp. 1819-1825

Authors: MAHAJAN A KELLERMAN BK RUSSELL NM BANERJEE S CAMPION A EKERDT JG TASCH A WHITE JM BONSER DJ
Citation: A. Mahajan et al., SURFACE-CHEMISTRY OF DIETHYLSILANE AND DIETHYLGERMANE ON SI(100) - ANATOMIC LAYER EPITAXY APPROACH, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(4), 1994, pp. 2265-2270

Authors: ASAMI S RUSSELL NM MAHAJAN A STEINER PA BONSER DJ FRETWELL J BANNERJEE S TASCH A WHITE JM EKERDT JG
Citation: S. Asami et al., ADAPTIVE TEMPERATURE PROGRAM ALE OF SI1-XGEX SI HETEROSTRUCTURES FROMSI2H6/GE2H6/, Applied surface science, 82-3, 1994, pp. 359-366
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