Authors:
KELLERMAN BK
MAHAJAN A
RUSSELL NM
EKERDT JG
BANERJEE SK
TASCH AF
CAMPION A
WHITE JM
BONSER DJ
Citation: Bk. Kellerman et al., ADSORPTION AND DECOMPOSITION OF DIETHYLSILANE AND DIETHYLGERMANE ON SI(100) - SURFACE-REACTIONS FOR AN ATOMIC LAYER EPITAXIAL APPROACH TO COLUMN-IV EPITAXY, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(4), 1995, pp. 1819-1825
Authors:
MAHAJAN A
KELLERMAN BK
RUSSELL NM
BANERJEE S
CAMPION A
EKERDT JG
TASCH A
WHITE JM
BONSER DJ
Citation: A. Mahajan et al., SURFACE-CHEMISTRY OF DIETHYLSILANE AND DIETHYLGERMANE ON SI(100) - ANATOMIC LAYER EPITAXY APPROACH, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(4), 1994, pp. 2265-2270
Authors:
ASAMI S
RUSSELL NM
MAHAJAN A
STEINER PA
BONSER DJ
FRETWELL J
BANNERJEE S
TASCH A
WHITE JM
EKERDT JG
Citation: S. Asami et al., ADAPTIVE TEMPERATURE PROGRAM ALE OF SI1-XGEX SI HETEROSTRUCTURES FROMSI2H6/GE2H6/, Applied surface science, 82-3, 1994, pp. 359-366