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Results:
1-16
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Results: 16
Authors:
BOOTH JP
CUNGE G
NEUILLY F
SADEGHI N
Citation: Jp. Booth et al., ABSOLUTE RADICAL DENSITIES IN ETCHING PLASMAS DETERMINED BY BROAD-BAND UV ABSORPTION-SPECTROSCOPY, Plasma sources science & technology, 7(3), 1998, pp. 423-430
Authors:
CUNGE G
CHABERT P
BOOTH JP
Citation: G. Cunge et al., LASER-INDUCED FLUORESCENCE DETECTION OF SIF2 AS A PRIMARY PRODUCT OF SI AND SIO2 REACTIVE ION ETCHING WITH CF4 GAS, Plasma sources science & technology, 6(3), 1997, pp. 349-360
Authors:
BOOTH JP
CUNGE G
SADEGHI N
BOSWELL RW
Citation: Jp. Booth et al., THE TRANSITION FROM SYMMETRICAL TO ASYMMETRIC DISCHARGES IN PULSED 13.56-MHZ CAPACITIVELY COUPLED PLASMAS, Journal of applied physics, 82(2), 1997, pp. 552-560
Authors:
TSEREPI AD
DEROUARD J
BOOTH JP
SADEGHI N
Citation: Ad. Tserepi et al., CF2 KINETICS AND RELATED MECHANISMS IN THE PRESENCE OF POLYMERS IN FLUOROCARBON PLASMAS, Journal of applied physics, 81(5), 1997, pp. 2124-2130
Authors:
GICQUEL A
CHENEVIER M
BRETON Y
PETIAU M
BOOTH JP
HASSOUNI K
Citation: A. Gicquel et al., GROUND-STATE AND EXCITED-STATE H-ATOM TEMPERATURES IN A MICROWAVE PLASMA DIAMOND DEPOSITION REACTOR, Journal de physique. III, 6(9), 1996, pp. 1167-1180
Authors:
BRAITHWAITE NS
BOOTH JP
CUNGE G
Citation: Ns. Braithwaite et al., A NOVEL ELECTROSTATIC-PROBE METHOD FOR ION FLUX MEASUREMENTS, Plasma sources science & technology, 5(4), 1996, pp. 677-684
Authors:
BOOTH JP
DEROUARD J
FADLALLAH M
CABARET L
PINARD J
Citation: Jp. Booth et al., ELECTRIC-FIELD MEASUREMENTS IN DISCHARGES BY DOPPLER-FREE 2-PHOTON LASER STARK SPECTROSCOPY OF ATOMIC-HYDROGEN, Optics communications, 132(3-4), 1996, pp. 363-370
Authors:
BOOTH JP
HANCOCK G
TOOGOOD MJ
MCKENDRICK KG
Citation: Jp. Booth et al., QUANTITATIVE LASER-INDUCED FLUORESCENCE SPECTROSCOPY OF THE CF A(2)SIGMA(-X(2)PI TRANSITION - ELECTRONIC-TRANSITION DIPOLE-MOMENT FUNCTION AND PREDISSOCIATION()), Journal of physical chemistry, 100(1), 1996, pp. 47-53
Authors:
FADLALLAH M
BOOTH JP
DEROUARD J
SADEGHI N
BELENGUER P
Citation: M. Fadlallah et al., SHEATH ELECTRIC-FIELD OSCILLATION AND ION KINETICS IN RADIOFREQUENCY DISCHARGES, Journal of applied physics, 79(12), 1996, pp. 8976-8981
Authors:
CUNGE G
BOOTH JP
DEROUARD J
Citation: G. Cunge et al., ABSOLUTE CONCENTRATION MEASUREMENTS BY PULSED LASER-INDUCED FLUORESCENCE IN LOW-PRESSURE GASES - ALLOWING FOR SATURATION EFFECTS, Chemical physics letters, 263(5), 1996, pp. 645-650
Authors:
ELLINGBOE AR
BOSWELL RW
BOOTH JP
SADEGHI N
Citation: Ar. Ellingboe et al., ELECTRON-BEAM PULSES PRODUCED BY HELICON-WAVE EXCITATION, Physics of plasmas, 2(6), 1995, pp. 1807-1809
Authors:
STONGE L
SADEGHI N
BOOTH JP
MARGOT J
BARBEAU C
Citation: L. Stonge et al., ON THE FORMATION AND LOSS OF S-2 MOLECULES IN A REACTIVE ION ETCHING REACTOR OPERATING WITH SF6, Journal of applied physics, 78(12), 1995, pp. 6957-6966
Authors:
PETRI R
KENNEDY B
HENRY D
SADEGHI N
BOOTH JP
Citation: R. Petri et al., TUNGSTEN ETCHING IN PULSED SF6 PLASMAS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(5), 1994, pp. 2970-2975
Authors:
CHENEVIER M
CUBERTAFON JC
CAMPARGUE A
BOOTH JP
Citation: M. Chenevier et al., MEASUREMENT OF ATOMIC-HYDROGEN IN A HOT-FILAMENT REACTOR BY 2-PHOTON LASER-INDUCED FLUORESCENCE, DIAMOND AND RELATED MATERIALS, 3(4-6), 1994, pp. 587-592
ELECTRIC-FIELD MEASUREMENTS IN DISCHARGES BY 2-HYDROGEN(1 PHOTON LASER STARK SPECTROSCOPY OF ATOMIC)
Authors:
BOOTH JP
FADLALLAH M
DEROUARD J
SADEGHI N
Citation: Jp. Booth et al., ELECTRIC-FIELD MEASUREMENTS IN DISCHARGES BY 2-HYDROGEN(1 PHOTON LASER STARK SPECTROSCOPY OF ATOMIC), Applied physics letters, 65(7), 1994, pp. 819-821
Authors:
BOOTH JP
DEROUARD J
FADLALLAH M
SADEGHI N
Citation: Jp. Booth et al., TIME-RESOLVED ELECTRIC-FIELD MEASUREMENTS IN 30 KHZ HYDROGEN DISCHARGES BY OPTICAL-EMISSION STARK SPECTROSCOPY, Journal of applied physics, 74(2), 1993, pp. 862-867
Risultati:
1-16
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